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CYMER® EXCIMER LASER SPARE PARTS

ELRC sells repaired and refurbished Cymer excimer laser consumable and non-consumable modules. We test and qualify all repaired and refurbished modules at our Escondido facility before shipment to customers. ELRC provides a warranty for all modules in order to guarantee performance. We also offer our customers installation services for all modules.

Consumable Modules

Consumable modules represent the largest expense in operating a Cymer® excimer laser. Our consumable modules and excellent customer service provide significant savings to our customers.

Non-Consumable Modules

While non-consumable modules require replacement far less frequently than consumable modules, ELRC repairs and refurbishes these modules as well, and we maintain a stock of tested and qualified units for additional customer support.

ELRC PROVIDES FULL SUPPORT FOR THE FOLLOWING CYMER® EXCIMER LASER SYSTEMS:

5000 Series

6000 Series

7000 Series

XLA/XLR Series (Future)

Consumable Modules

Discharge Chambers

Line Narrowing Modules (LNM)

Wavelength Stabilization Modules (WSM)

F2 Traps

Output Couplers

Non-Consumable Modules

Control Modules

Printed Circuit Boards

High Voltage Power Supplies

Commutation Modules

Compression Heads

High Voltage Cables

Gas Modules

Cooling Modules

Other miscellaneous parts

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